Abstract: Based on the problems of high cost, high pollution and difficult supervision of SF₆ gas in power equipment, this paper proposes to establish and improve the scheme of efficient electrical equipment SF₆ gas recovery, purification and reuse device, and further studies and analyzes the basic principle and technical process of SF₆ gas recovery and treatment system. Feasibility of the device is tested through experiments, which shows that the treated SF₆ gas would meet the requirements of relevant indicators and realize the recycling of SF₆ gas.