Abstract: As an important elastic sensitive component in pressure sensors, the physical performance of corrugated diaphragm will directly affect the linearity, sensitivity, and stability of pressure sensors. In this article, based on the ANSYS finite element analysis software, the eigenvalue buckling analysis is performed on the corrugated diaphragm. Taking their first-order buckling mode as the initial geometric imperfection, static analysis is conducted on the corrugated diaphragm model with or without considering the initial imperfection. The finite element analysis results show that compared to not introducing initial imperfections, using the first-order buckling mode as the initial imperfection can obtain smaller displacement and maximum stress value, which is of great significance for the design and analysis of corrugated diaphragm.