Abstract: Aiming at the problem such as wrinkling and detachment caused by the vibration of flexible thin film sensors during tool performance testing, the ABAQUS finite element software is used to perform a modal analysis on the flexible thin film sensors, then the first eight natural frequencies and the corresponding vibration modes of the flexible thin film sensor are obtained. Optimization control of the flexible thin film sensors is conducted according to different substrate materials. It is verified that natural frequency of the structure can be effectively improved by reducing the thickness of the substrate layer and increasing the elastic modulus of the substrate layer, and the resonance phenomena caused by the tool vibration can be avoided during operation process of the sensor. It would provide a certain reference for the production and manufacturing of flexible film sensors.