立式炉密封摆动炉门设计分析

Design and Research on Sealed Swing Door of Vertical Furnace

  • 摘要: 在半导体集成电路制造领域,立式炉是芯片热处理工艺的关键设备,整体采用立式结构布局。摆动炉门的 O 形密封圈与反应室贴合过紧或过松,都会影响元器件使用寿命,并降低设备运行可靠性。该文围绕一款高性价比的自动密封式摆动炉门开展结构设计研究,对炉门承载机构的压缩弹簧、轴承进行受力分析与参数选型;同时针对炉门启闭过程,完成缓冲器动能吸收校核与型号匹配。研究结果表明:采用 O 形圈与弹簧组合密封、气缸驱动的摆动炉门结构,密封性能稳定可靠,还可有效减弱炉门启闭振动对整机设备的影响。

     

    Abstract: In the field of semiconductor integrated circuits, vertical furnaces are critical equipment used for thermal processing, featuring a vertical structural layout. If the O-ring of the swinging furnace door fits too tightly or too loosely against the reaction chamber, it can adversely affect the lifespan of components and reduce the equipment's reliability. This paper conducts a structural design study on a cost-effective self-sealing swing furnace door. The force analysis and parameter selection are carried out for the compression springs and bearings of the furnace door supporting mechanism. Meanwhile, kinetic energy absorption verification and model selection of the absorber are completed for the opening and closing process of the swing furnace door. The results show that the swing furnace door structure adopting O-ring and spring combined sealing and cylinder driving achieves stable and reliable sealing performance, and can effectively reduce the impact of vibration generated during door opening and closing on the overall equipment.

     

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