基于S型柔性铰链的大行程纳米定位平台设计与分析

Design and Analysis of Large-Stroke Nanopositioning Stage based on S-shaped Flexible Hinge

  • 摘要: 针对传统柔性铰链纳米定位平台存在的行程限制问题,该文提出了一种创新的S型柔性铰链复合结构,并据此设计了一维度大行程纳米定位平台。通过有限元方法,对基于直梁铰链和S型复合铰链的两种定位平台进行了静力学及模态特性的对比分析。结果表明,S型铰链平台在保持较小驱动力的同时,实现了平板型铰链平台2.5倍的最大行程。尽管S型铰链平台存在耦合误差较大的问题,但其通过增加动平台两侧的铰链数目有效提升了系统刚度,显著降低了耦合误差并改善了动态性能。此设计不仅为大行程纳米定位平台提供了一种新的解决方案,而且在精密制造、生物科学及微/纳米级医疗手术等领域展现出广泛的应用潜力。

     

    Abstract: Aiming at the limited stroke of traditional flexible hinge nanopositioning stages, this paper proposes an innovative composite hinge structure based on S-shaped flexible hinges and accordingly develops a one-dimensional large-stroke nanopositioning stage. Static and modal characteristics of two positioning stages equipped with straight-beam hinges and S-shaped composite hinges are compared and analyzed via the finite element method. The results indicate that the S-shaped hinge stage achieves a maximum stroke 2.5 times that of the flat hinge stage while maintaining low driving force. Although the S-shaped hinge stage suffers from relatively large coupling errors, increasing the number of hinges on both sides of the moving platform effectively enhances system stiffness, suppresses coupling errors and improves dynamic performance. This design provides a new solution for large-stroke nanopositioning stages and possesses broad application potential in precision manufacturing, biological sciences, and micro/nano-scale medical surgeries.

     

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