基于微铣削工艺的微液滴芯片设计与加工

Design and Processing of Micro-droplet Chips based on Micro-Milling Technology

  • 摘要: 该文研究了基于微铣削技术的微液滴芯片设计与制备工艺,重点优化了微通道结构设计及加工工艺。针对基础Y型流道,设计并优选出三种微通道结构,通过液滴生成实验验证了其在转角处形成连续稳定液滴的能力,完成了芯片制备。实验表明,微铣削技术适合在PMMA材料上加工微流道,其截面尺寸受刀具尺寸、加工参数及材料特性影响,相较光刻技术具有成本低、灵活性高的优势。研究采用UG软件进行芯片结构设计并导出CAD图,通过Autodesk Artcam Premium 2018设定刀具路径和加工参数,传输至加工设备并使用微铣刀加工PMMA板材。针对主轴转速和进给率等关键参数,通过分析微流道表面粗糙度优化加工参数,确定稳定工艺条件。芯片加工完成后,选用两种密度不同的流体注入不同微流道进行液滴生成实验,高密度流体包裹住低密度流体而形成独立、连续的液滴,最终筛选出性能最佳的微液滴芯片结构。研究内容为微液滴芯片的高效、低成本制备提供了理论与实践依据。

     

    Abstract: This paper investigates the design and fabrication process of micro-droplet chips based on micro-milling technology, with emphasis on optimizing microchannel structures and machining processes. Taking the basic Y-shaped channel as the research object, three microchannel structures are designed and screened. Droplet-generation experiments are conducted to verify their capability of producing continuous and stable droplets at channel corners, and the chips are accordingly fabricated. Experimental results indicate that micro-milling is applicable for machining microchannels on PMMA. The cross-sectional dimensions of microchannels are affected by tool size, machining parameters and material properties. Compared with photolithography, micro-milling possesses the advantages of low cost and high flexibility. The chip structure is designed in UG software and CAD drawings are exported. Tool paths and machining parameters are configured in Autodesk Artcam Premium 2018. The generated program is transmitted to processing equipment, and micro-milling cutters are adopted to machine PMMA plates. Key parameters including spindle speed and feed rate are optimized through analyzing the surface roughness of microchannels, so as to determine stable process conditions. After the chips are manufactured, two fluids with different densities are injected into respective microchannels for droplet-generation tests. The high-density fluid encapsulates the low-density fluid to form independent and continuous droplets, and the micro-droplet chip structure with optimal performance is finally selected. This research provides theoretical basis and practical references for the efficient and low-cost fabrication of micro-droplet chips.

     

/

返回文章
返回