Abstract: To improve the precision and stability of the coating process for perovskite photovoltaic cells, this paper investigates the rigidity, precision retention and substrate clamping of the equipment base platform. Structural analysis and optimization are carried out on the marble base of perovskite coating equipment to illustrate the material advantages of marble in thermal stability, stiffness and damping capacity. Finite element simulation is adopted to verify the dynamic stiffness and operational stability of the platform. The research methods and conclusions provide technical references for structural design and performance verification of critical base components of high-precision perovskite coating equipment.