平面涂布设备模头高精度协同运动控制技术研究

Research on High-Precision Coordinated Motion Control Technology of Flat Coating Equipment Die Head

  • 摘要: 钙钛矿太阳能电池产业化的关键在于通过平面涂布低成本制备大面积高性能薄膜,其中模头的运动控制精度对薄膜质量和电池性能至关重要。该文重点围绕钙钛矿涂布设备中模头的水平直驱运动与垂直间隙调节两个维度,开展高精度协同运动控制系统的研究与设计。文中首先分析钙钛矿涂布工艺对模头多自由度运动的精度需求;接着详细阐述了水平直驱控制与垂直双伺服控制的技术优势、工作原理、系统构成和控制方法;最后通过实验验证了所设计系统在水平位移精度可控制在±0.07%之内、速度精度可控制在±0.1%之内,垂直间隙定位精度可控制在10 μm之内,可为钙钛矿涂布工艺对模头运动的技术研究提供参考。

     

    Abstract: The key to the industrialization of perovskite solar cells lies in preparing large-area, high-performance films at low cost through planar coating, where the motion control precision of the coater head is crucial to the film quality and cell performance. This paper focuses on the study and design of a high-precision coordinated motion control system from two dimensions in perovskite coating equipment: the horizontal direct-drive movement and the vertical gap adjustment of the coater head. The paper first analyzes the precision requirements of multi-degree-of-freedom motion of the coater head imposed by the perovskite coating process; next, it elaborates on the technical advantages, working principles, system composition, and control methods of horizontal direct-drive control and vertical dual-servo control; finally, experiments verify that the designed system can achieve horizontal displacement accuracy within ±0.07%, speed accuracy within ±0.1%, and vertical gap positioning accuracy within 10 μm, providing a reference for the technological research of coater head motion in perovskite coating processes.

     

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