基于MEMS技术的高量程压力传感器结构优化研究

Research on Structural Optimization of High Range Pressure Sensor based on MEMS Technology

  • 摘要: MEMS压力传感器已广泛应用于航空航天等工业领域。伴随科技的发展与技术的进步,对其承压能力及结构强度要求越来越高,而基于MEMS技术的高量程压力传感器结构设计是传感器研制过程中的核心关键环节,合理的结构设计与匹配的金属母材能够有效提升其耐压性能与工作可靠性。该文结合热传导和力学原理仿真计算出高量程MEMS压力传感器合理的焊接熔深,进而优选适配的焊接工艺和焊接参数;同时对MEMS压力传感器进行结构优化研究,采用多物理场耦合建模,仿真分析出合适的设计结构,并通过工程实证验证结构的正确性。该研究可有效提升MEMS压力传感器在高压、高过载、高温严苛工况下的结构性能与工作稳定性、可靠性,为高量程MEMS压力传感器的极端环境工程应用提供理论依据与数据支撑。

     

    Abstract: MEMS pressure sensors are widely used in aerospace and other industrial fields. With advancing science and technology, higher requirements have been placed on their pressure-bearing capacity and structural strength. The structural design of high-range MEMS pressure sensors is a core crucial part of sensor development, and reasonable structural design with matched metal base materials can effectively improve sensor pressure resistance and operational reliability. This paper adopts thermal conduction and mechanical principles to simulate and calculate reasonable welding penetration of high-range MEMS pressure sensors, optimizing applicable welding processes and parameters. Meanwhile, structural optimization of the MEMS pressure sensor is conducted via multi-physics coupling modeling; the optimal structural scheme is obtained through simulation analysis and verified by engineering demonstration. This research improves the structural performance, stability and reliability of MEMS pressure sensors under harsh high-pressure, high-overload and high-temperature conditions, providing theoretical basis and data support for engineering applications of high-range MEMS pressure sensors in extreme environments.

     

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