Abstract:
In the field of semiconductor integrated circuits, vertical furnaces are critical equipment used for thermal processing, featuring a vertical structural layout. If the O-ring of the swinging furnace door fits too tightly or too loosely against the reaction chamber, it can adversely affect the lifespan of components and reduce the equipment's reliability. This paper conducts a structural design study on a cost-effective self-sealing swing furnace door. The force analysis and parameter selection are carried out for the compression springs and bearings of the furnace door supporting mechanism. Meanwhile, kinetic energy absorption verification and model selection of the absorber are completed for the opening and closing process of the swing furnace door. The results show that the swing furnace door structure adopting O-ring and spring combined sealing and cylinder driving achieves stable and reliable sealing performance, and can effectively reduce the impact of vibration generated during door opening and closing on the overall equipment.