立式炉密封摆动炉门设计分析

Design and Research on Sealed Swing Door of Vertical Furnace

  • 摘要: 在半导体集成电路领域立式炉是用于热处理的关键设备,结构采用垂直布局形式,当摆动炉门的O形圈与反应室贴合太紧或太松,均会影响元器件的使用寿命,降低设备的可靠性。本文重点开展了一种性价比高且能实现自动密封摆动炉门的设计方案研究,对承载摆动炉门的压缩弹簧、轴承进行受力分析与选型,以及对摆动炉门打开与关闭过程中缓冲器吸收动能进行了计算与选型,验证了采用O形圈与弹簧组合并由气缸驱动的密封摆动炉门可满足密封可靠的要求,可降低摆动炉门震动对设备的影响。

     

    Abstract: In the field of semiconductor integrated circuits, vertical furnaces are critical equipment used for thermal processing, featuring a vertical structural layout. If the O-ring of the swinging furnace door fits too tightly or too loosely against the reaction chamber, it can adversely affect the lifespan of components and reduce the equipment's reliability. This paper focuses on the design and research of a cost-effective, automatically sealing swinging furnace door. The study concludes that a sealing swinging furnace door combining an O-ring with a spring and driven by a cylinder can meet the requirements for reliable sealing. Additionally, the selection of a buffer to absorb kinetic energy can mitigate the impact of door vibrations on the equipment.

     

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