Design and Analysis of Large-Stroke Nanopositioning Stage based on S-shaped Flexible Hinge

Aiming at the limited stroke of traditional flexible hinge nanopositioning stages, this paper proposes an innovative composite hinge structure based on S-shaped flexible hinges and accordingly develops a one-dimensional large-stroke nanopositioning stage. Static and modal characteristics of two positioning stages equipped with straight-beam hinges and S-shaped composite hinges are compared and analyzed via the finite element method. The results indicate that the S-shaped hinge stage achieves a maximum stroke 2.5 times that of the flat hinge stage while maintaining low driving force. Although the S-shaped hinge stage suffers from relatively large coupling errors, increasing the number of hinges on both sides of the moving platform effectively enhances system stiffness, suppresses coupling errors and improves dynamic performance. This design provides a new solution for large-stroke nanopositioning stages and possesses broad application potential in precision manufacturing, biological sciences, and micro/nano-scale medical surgeries.