Research on High-Precision Coordinated Motion Control Technology of Flat Coating Equipment Die Head

The key to the industrialization of perovskite solar cells lies in preparing large-area, high-performance films at low cost through planar coating, where the motion control precision of the coater head is crucial to the film quality and cell performance. This paper focuses on the study and design of a high-precision coordinated motion control system from two dimensions in perovskite coating equipment: the horizontal direct-drive movement and the vertical gap adjustment of the coater head. The paper first analyzes the precision requirements of multi-degree-of-freedom motion of the coater head imposed by the perovskite coating process; next, it elaborates on the technical advantages, working principles, system composition, and control methods of horizontal direct-drive control and vertical dual-servo control; finally, experiments verify that the designed system can achieve horizontal displacement accuracy within ±0.07%, speed accuracy within ±0.1%, and vertical gap positioning accuracy within 10 μm, providing a reference for the technological research of coater head motion in perovskite coating processes.