Research on Structural Optimization of High Range Pressure Sensor based on MEMS Technology

MEMS pressure sensor has been widely used in industrial fields such as aerospace. With the development and progress of technology, the requirements for their pressure bearing capacity and structural strength are becoming increasingly high. The structural design of high range pressure sensors based on MEMS technology is an important and critical process. Proper structural design and metal base materials can help improve pressure resistance and reliability. This article combines the principles of heat conduction and mechanics to simulate and calculate the reasonable welding penetration for high range MEMS pressure sensors, and optimizes the welding process and parameters; Conduct structural optimization research on MEMS pressure sensor, adopt multi physics field coupling modeling, simulate and analyze suitable design structures; Verify the correctness of the structure through engineering verification. Further improve the structural performance of MEMS pressure sensor under high pressure, high overload, and high temperature, enhance the stability and reliability of MEMS pressure sensor, and provide theoretical basis and data support for the use of MEMS high range pressure sensor in harsh environments.